ISSN:
0948-1907
Keywords:
Permalloy
;
MOCVD
;
Ferromagnetic thin films
;
Magnetoresistance
;
Chemistry
;
Polymer and Materials Science
Source:
Wiley InterScience Backfile Collection 1832-2000
Topics:
Chemistry and Pharmacology
,
Mechanical Engineering, Materials Science, Production Engineering, Mining and Metallurgy, Traffic Engineering, Precision Mechanics
Notes:
Thin films of elemental iron and nickel, plus a wide composition range of iron-nickel alloys, have been deposited by atmospheric pressure metal organic chemical vapor deposition at a growth temperature of 200°C, using iron pentacarbonyl and nickel tetracarbonyl as the source precursors. Detailed magnetoresistance measurements of the permalloy layers showed that the maximum value of magnetoresistance occurred at a composition of approximately 90 % Ni10 % Fe, and the maximum sensitivity occurred at approximately 80 % Ni20 % Fe, in accordance with literature values. In addition, both the application of an 80 mT magnetic field during deposition and the annealing of samples at temperatures higher than the growth temperature of 200°C improved the magnetic properties.
Additional Material:
7 Ill.
Type of Medium:
Electronic Resource
URL:
http://dx.doi.org/10.1002/cvde.19970030208
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