Springer Online Journal Archives 1860-2000
Mechanical Engineering, Materials Science, Production Engineering, Mining and Metallurgy, Traffic Engineering, Precision Mechanics
Abstract The formation of nanocrystals after implantation of silver alone as well as together with the halogen ions Cl, Br and I into a SiO2 layer of about 100 nm was studied by X-ray diffraction and transmission electron microscopy. The co-implantation of Ag and Cl or Br results in the formation of cubic AgX crystals which are stable in size under annealing. The co-implantation of Ag and I as well as single Ag implantation result in Ag crystallites, which grow under annealing. The annealing procedure causes a redistribution of the particles within the layer.
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