ISSN:
0142-2421
Keywords:
phase formation
;
ion beam bombardment
;
Al-Au
;
multilayers
;
XRD
;
RBS
;
Chemistry
;
Polymer and Materials Science
Source:
Wiley InterScience Backfile Collection 1832-2000
Topics:
Physics
Notes:
High-current ion beam bombardment (IBB) was performed to interdiffuse Al-Au multilayers produced by evaporation on flat substrates of carbon, silicon and gold (typical thickness of each layer 150 nm, packages consist of 2 and 2.5 periods). During IBB with 2 MeV 4He+ ions, the Al-Au interdiffusion was measured simultaneously with Rutherford backscattering (RBS). A complete mixing of the multilayers close to the surface is achieved within a few minutes and observed by variations in the Al-Au ratios. X-ray diffraction (XRD) was used to study the phase formation in detail. In as-deposited specimens only the reflections of both metals are detected, whereas after IBB the main intermetallic phase is AlAu2. Small amounts of further Al-Au phases are observed additionally in dependence on the substrate type. It was deduced from complementary RBS and XRD analyses that intermixing in such multilayered systems is thermally dominated. © 1998 John Wiley & Sons, Ltd.
Additional Material:
7 Ill.
Type of Medium:
Electronic Resource
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