Digitale Medien
Woodbury, NY
:
American Institute of Physics (AIP)
Applied Physics Letters
69 (1996), S. 1247-1249
ISSN:
1077-3118
Quelle:
AIP Digital Archive
Thema:
Physik
Notizen:
This letter describes a simple and straightforward approach to the thickness measurement of silicon film on insulator, whose double-crystal x-ray diffraction curve is found of a sinusoidal slit function, as predicted by the dynamical scattering theory. © 1996 American Institute of Physics.
Materialart:
Digitale Medien
URL:
http://dx.doi.org/10.1063/1.117426
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