Electronic Resource
Woodbury, NY
:
American Institute of Physics (AIP)
Applied Physics Letters
69 (1996), S. 1247-1249
ISSN:
1077-3118
Source:
AIP Digital Archive
Topics:
Physics
Notes:
This letter describes a simple and straightforward approach to the thickness measurement of silicon film on insulator, whose double-crystal x-ray diffraction curve is found of a sinusoidal slit function, as predicted by the dynamical scattering theory. © 1996 American Institute of Physics.
Type of Medium:
Electronic Resource
URL:
http://dx.doi.org/10.1063/1.117426
Permalink
|
Location |
Call Number |
Expected |
Availability |