Electronic Resource
Woodbury, NY
:
American Institute of Physics (AIP)
Applied Physics Letters
66 (1995), S. 1933-1935
ISSN:
1077-3118
Source:
AIP Digital Archive
Topics:
Physics
Notes:
The electrodes of a microwave coplanar waveguide (CPW) on planar p-InP epitaxial layers are electrically isolated by helium implantation. Impedance, attenuation, and relative effective dielectric permittivity of implanted and unimplanted samples are compared over a frequency range of 0.13–20 GHz. The results show that coplanar waveguides on 4He+ implanted materials exhibit very low loss (〈1.4 dB/cm) and low dispersion comparable to those fabricated directly on semi-insulating InP. CPWs made on uniformly implanted substrates show no significant change in dielectric permittivity after annealing at temperatures up to 310 °C. © 1995 American Institute of Physics.
Type of Medium:
Electronic Resource
URL:
http://dx.doi.org/10.1063/1.113281
Permalink
|
Location |
Call Number |
Expected |
Availability |