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Performance of a high-current metal vapor vacuum arc ion source (1990)

Shiraishi, Hiroshi ; Brown, Ian G.

[S.l.] : American Institute of Physics (AIP)

Review of Scientific Instruments 61 (1990), S. 3775-3782

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ISSN: 1089-7623

Source: AIP Digital Archive

Topics: Physics , Electrical Engineering, Measurement and Control Technology

Notes: The operational characteristics of a metal vapor vacuum arc ion source have been studied. The beam current has been measured as a function of ion source extraction voltage (5–80 kV), arc current (50–250 A), metal-ion species (Ti, Ta, and Pb), and extractor grid spacing (0.89 and 0.38 cm). The measured beam current ranged up to 700 mA. The parametric variation of beam current is compared to that expected from the Child–Langmuir equation and excellent agreement is found.

Type of Medium: Electronic Resource

URL: http://dx.doi.org/10.1063/1.1141552

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