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  • 1
    Electronic Resource
    Electronic Resource
    Applications of ICP-MS in semiconductor industry (1999)
    Springer
    Fresenius' journal of analytical chemistry 364 (1999), S. 385-390 
    Details
    ISSN: 1432-1130
    Source: Springer Online Journal Archives 1860-2000
    Topics: Chemistry and Pharmacology
    Notes: Abstract Contamination in semiconductor industry is a very serious drawback during the production of integrated circuits. Connected with the ongoing miniaturization smaller and smaller amounts of metal contamination can effect the integrated circuits. Because of the outstanding detection limits ICP-MS is widely spread in semiconductor industry. The main applications are metal and semi-metal analysis in deionized water, chemicals and on the wafer surface. The challenges in semiconductor industry are the required detection limits, which are mainly limited by contamination during sample treatment and the background of the instruments.
    Type of Medium: Electronic Resource
    URL: http://dx.doi.org/10.1007/s002160051355
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