ISSN:
1588-2780
Source:
Springer Online Journal Archives 1860-2000
Topics:
Chemistry and Pharmacology
,
Energy, Environment Protection, Nuclear Power Engineering
Notes:
Abstract The specific application of neutron activation analysis in the research on the preparation of silicon integrated circuits is discussed. The high flux irradiation facility for large silicon wafers (up to 15 cm diameter) was used, the analytical procedure, and some typical results will be described.
Type of Medium:
Electronic Resource
URL:
http://dx.doi.org/10.1007/BF02050513