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Application of neutron activation analysis in the field of silicon technology for the modern electronic industry

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Abstract

The specific application of neutron activation analysis in the research on the preparation of silicon integrated circuits is discussed. The high flux irradiation facility for large silicon wafers (up to 15 cm diameter) was used, the analytical procedure, and some typical results will be described.

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References

  1. P. F. SCHMIDT, C. W. PEARCE, J. Electrochem. Soc., 129 (1981) 630.

    Google Scholar 

  2. J. F. J. VISSER, D. de ZAAIJER of the E.C.N. Petten are the designers of this so called SIP (Silicon Investigation Philips) facility; their cooperation is highly appreciated.

  3. A. SIMONITS, L. MOENS, F. de CORTE, A. de WISPELAERE, A. ELEK, J. HOSTE, J. Radioanal. Chem., 60 (1980) 461, and private communication.

    Google Scholar 

  4. M. L. VERHEIJKE, J. Radioanal. Chem., 35 (1977) 79.

    Google Scholar 

  5. S. NIESE, Kernenergie, 7 (1964) 105, and J. Radioanal. Chem., 38 (1977) 37.

    Google Scholar 

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Authors and Affiliations

  1. Philips Research Laboratories, P.O. Box 80000, 5600 JA, Eindhoven, (The Netherlands)

    M. L. Verheijke, H. J. J. Jaspers, J. M. G. Hanssen & M. J. J. Theunissen

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  1. M. L. Verheijke
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  2. H. J. J. Jaspers
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  3. J. M. G. Hanssen
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  4. M. J. J. Theunissen
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Verheijke, M.L., Jaspers, H.J.J., Hanssen, J.M.G. et al. Application of neutron activation analysis in the field of silicon technology for the modern electronic industry. Journal of Radioanalytical and Nuclear Chemistry, Articles 113, 397–403 (1987). https://doi.org/10.1007/BF02050513

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  • DOI: https://doi.org/10.1007/BF02050513

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