ISSN:
1573-4803
Source:
Springer Online Journal Archives 1860-2000
Topics:
Mechanical Engineering, Materials Science, Production Engineering, Mining and Metallurgy, Traffic Engineering, Precision Mechanics
Notes:
Abstract The preparation of indium phosphide by reactions between separate indium chlorides and phosphine is described. It is shown that the indium monochloride-phosphine reaction is the most favourable of the three possible reactions. It is demonstrated that various growth rates are possible over a range of temperatures, that good morphological layers can be obtained along with reasonable electrical characteristics. Explanations are advanced for the chemical process and the limitations on layer properties encountered.
Type of Medium:
Electronic Resource
URL:
http://dx.doi.org/10.1007/BF01058097