Abstract
The preparation of indium phosphide by reactions between separate indium chlorides and phosphine is described. It is shown that the indium monochloride-phosphine reaction is the most favourable of the three possible reactions. It is demonstrated that various growth rates are possible over a range of temperatures, that good morphological layers can be obtained along with reasonable electrical characteristics. Explanations are advanced for the chemical process and the limitations on layer properties encountered.
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Parfitt, H.T., Robertson, D.S. & Wilson, A.R. The preparation of indium phosphide layers by chloride-hydride reactions. J Mater Sci 19, 2211–2218 (1984). https://doi.org/10.1007/BF01058097
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DOI: https://doi.org/10.1007/BF01058097