ISSN:
1089-7623
Source:
AIP Digital Archive
Topics:
Physics
,
Electrical Engineering, Measurement and Control Technology
Notes:
Axial energy spread and useful beam current of positive ion beams have been carried out using a radio frequency (rf)-driven multicusp ion source. Operating the source with a 13.56 MHz induction discharge, the axial energy spread is found to be approximately 3.2 eV. The extractable beam current of the rf-driven source is found to be comparable to that of filament-discharge sources. With a 0.6 mm diameter extraction aperture, a positive hydrogen ion beam current density of 80 mA/cm2 can be obtained at a rf input power of 2.5 kW. The expected source lifetime is much longer than that of filament discharges. © 1997 American Institute of Physics.
Type of Medium:
Electronic Resource
URL:
http://dx.doi.org/10.1063/1.1147948