ISSN:
1572-8986
Keywords:
Low-pressure multipole discharge
;
kinetic equilibrium among species
;
electron energy distribution function
;
Balmer line profiles
Source:
Springer Online Journal Archives 1860-2000
Topics:
Chemistry and Pharmacology
,
Mechanical Engineering, Materials Science, Production Engineering, Mining and Metallurgy, Traffic Engineering, Precision Mechanics
,
Technology
Notes:
Abstract This paper is devoted to the study of kinetic equilibrium among electrons, H2 molecules, H atoms, and positive H+, H 2 + , and H 3 + ions in a multipole discharge working under low-pressure (1- to 15-m Torr) and moderated current conditions. In such a discharge used either as a H+ or a H− ion source or for plasma-surface interactions, the dependence of the densities of these species versus experimental parameters is of a great interest. In the present situation, the electron energy distribution function (e.e.d.f.) is largely nonmaxwellian. The kinetic model that determines the densities of the plasma species is self-consistently coupled to the e.e.d.f. calculated through the use of the Boltzmann equation. The influence of the main processes, volume ones, and those involving plasma walls is emphasized. An attempt is made to use the profiles of Balmer lines obtained experimentally in order to determine absolute concentrations of H atoms and H 2 + ions. Results derived from the experiment are compared to results of the model. Such an analysis of Balmer line shapes appears to be an interesting way to determine, by anin situ nonintrusive method, the absolute concentration of H atoms.
Type of Medium:
Electronic Resource
URL:
http://dx.doi.org/10.1007/BF01054279
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