Electronic Resource
[S.l.]
:
American Institute of Physics (AIP)
Journal of Applied Physics
66 (1989), S. 462-463
ISSN:
1089-7550
Source:
AIP Digital Archive
Topics:
Physics
Notes:
Strained layer semiconductor heterostructures produced by molecular-beam epitaxy or metalorganic chemical vapor deposition growth are limited in thickness by relaxation producing dislocations, if a critical thickness tc is exceeded. We propose that, for a given thickness, strain values up to twice as large may be induced by post-growth processing with selective diffusion of the elemental constituents of the heterostructure.
Type of Medium:
Electronic Resource
URL:
http://dx.doi.org/10.1063/1.343851
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