ISSN:
1432-1130
Source:
Springer Online Journal Archives 1860-2000
Topics:
Chemistry and Pharmacology
Notes:
Abstract The binding structure in the interface region oxide film/polymer has been investigated by means of XPS and is correlated with the adhesion obtained by a Pull Test. Polycarbonate (PC) and diethyleneglycol-bisallylcarbonate (CR39) are employed as substrate and SiOxCyHz-films are deposited by using a pulsed microwave plasma deposition process (PICVD). Best adhesion is obtained by pretreatment of the substrate surface with an O2-plasma which increases the O/C ratio, in combination with a PICVD-process with low precursor content.
Type of Medium:
Electronic Resource
URL:
http://dx.doi.org/10.1007/s002160050351
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