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Interface characterization of PICVD-coated polymer substrates

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Abstract

The binding structure in the interface region oxide film/polymer has been investigated by means of XPS and is correlated with the adhesion obtained by a Pull Test. Polycarbonate (PC) and diethyleneglycol-bisallylcarbonate (CR39) are employed as substrate and SiOxCyHz-films are deposited by using a pulsed microwave plasma deposition process (PICVD). Best adhesion is obtained by pretreatment of the substrate surface with an O2-plasma which increases the O/C ratio, in combination with a PICVD-process with low precursor content.

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Authors and Affiliations

  1. SCHOTT-Glaswerke, Hattenbergstrasse 10, D-55014 Mainz, Germany, , , , , , DE

    V. Rupertus, C. Ottermann, S. Thiel & K. Bange

  2. Institut für Oberflächen- und Schichtanalytik an der Universität Kaiserslautern, D-67653 Kaiserslautern, , , , , , XX

    K. Berresheim & M. Kopnarski

Authors
  1. V. Rupertus
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  2. K. Berresheim
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  3. C. Ottermann
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  4. S. Thiel
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  5. M. Kopnarski
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  6. K. Bange
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Additional information

Received: 27 July 1996 / Revised: 13 January 1997 / Accepted: 18 January 1997

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Rupertus, V., Berresheim, K., Ottermann, C. et al. Interface characterization of PICVD-coated polymer substrates. Fresenius J Anal Chem 358, 85–88 (1997). https://doi.org/10.1007/s002160050351

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  • DOI: https://doi.org/10.1007/s002160050351

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