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  • 1
    Electronic Resource
    Electronic Resource
    Low-temperature anodic bonding of silicon to silicon wafers by means of intermediate glass layers (1999)
    Springer
    Microsystem technologies 5 (1999), S. 144-149 
    Details
    ISSN: 1432-1858
    Source: Springer Online Journal Archives 1860-2000
    Topics: Electrical Engineering, Measurement and Control Technology , Technology
    Notes: Abstract Silicon wafers have been anodically bonded to sputtered lithium borosilicate glass layers (Itb 1060) at temperatures as low as 150–180 °C and to sputtered Corning 7740 glass layers at 400 °C. Dependent on the thickness of the glass layer and the sputtering rate, the sputtered glass layers incorporate compressive stresses which cause the wafer to bow. As a result of this bowing, no anodic bond can be established especially along the edges of the silicon wafer. Successful anodic bonding not only requires plane surfaces, but also is determined very much by the alkali concentration in the glass layer. The concentration of alkali ions as measured by EDX and SNMS depends on both the sputtering rate and the oxygen fraction in the argon process gas. In Itb 1060 layers produced at a sputtering rate of 0.2 nm/s, and in Corning 7740 layers produced at sputtering rates of 0.03 and 0.5 nm/s, respectively, the concentration of alkali ions in the glass layers was sufficiently high, at oxygen partial pressures below 10-4 Pa, to achieve anodic bonding. High-frequency ultrasonic microanalysis allowed the bonding area to be examined non-destructively. Tensile strengths between 4 and 14 MPa were measured in subsequent destructive tensile tests of single-bonded specimens.
    Type of Medium: Electronic Resource
    URL: http://dx.doi.org/10.1007/s005420050154
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  • 2
    Electronic Resource
    Electronic Resource
    Combination of LIGA with other microstructure technologies (1996)
    Springer
    Microsystem technologies 2 (1996), S. 162-166 
    Details
    ISSN: 1432-1858
    Source: Springer Online Journal Archives 1860-2000
    Topics: Electrical Engineering, Measurement and Control Technology , Technology
    Notes: Abstract  The combination of the LIGA technique with other microstructure technologies like silicon technology, membrane technologies, and mechanical micromachining gives access to the development and manufacturing of new microsystems. The quasi-monolithic integration of LIGA microstructures on top of a CMOS-Wafer using a molding process will be shown which has the potential to integrate a LIGA component directly with microelectronic circuits. By combining mechanical micromachining, plastic molding, and membrane technologies a micropump has been developed which is one of the key components of the fluid handling module of microanalysis systems together with the well known LIGA microspectrometer. In the case of the micro-spectrometer, a small-scale series production was installed.
    Type of Medium: Electronic Resource
    URL: http://dx.doi.org/10.1007/s005420050036
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  • 3
    Electronic Resource
    Electronic Resource
    Propagation of adhesives in joints during capillary adhesive bonding of microcomponents (1999)
    Springer
    Microsystem technologies 6 (1999), S. 19-22 
    Details
    ISSN: 1432-1858
    Source: Springer Online Journal Archives 1860-2000
    Topics: Electrical Engineering, Measurement and Control Technology , Technology
    Notes: Abstract  Capillary adhesive bonding is used successfully to integrate microsystems. To ensure high reliability and quality of the interconnection technique, it is imperative that the propagation of adhesives in the joints be controlled. Two adhesives frequently used in capillary adhesive bonding were examined: a one-component, UV-curing methacrylate adhesive (Dymax 191-M), and a two-component epoxy resin bonding adhesive curing at room temperature (Epo-tek 302-3M). The propagation of these adhesives in joints with different gap heights of 2–20 μm between two PMMA surfaces and between one PMMA and one PI surface was measured and compared with the theoretical adhesive propagation in accordance with the Hagen–Poiseuille equation for a gap flow, with the capillary pressure taken into account. Once the dynamic viscosity, the wetting angle and the surface tension of the adhesive have been determined as a function of the measuring time, the measured propagation of the Epo-tek 302-3M and Dymax 191-M adhesives can be described in good agreement with the theory for all the gap heights under study.
    Type of Medium: Electronic Resource
    URL: http://dx.doi.org/10.1007/s005420050169
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  • 4
    Electronic Resource
    Electronic Resource
    Flow impedance in a uniform magnetically insulated transmission line (1999)
    [S.l.] : American Institute of Physics (AIP)
    Physics of Plasmas 6 (1999), S. 4791-4793 
    Details
    ISSN: 1089-7674
    Source: AIP Digital Archive
    Topics: Physics
    Notes: In two recent publications [C. W. Mendel, Jr. and S. E. Rosenthal, Phys. of Plasmas 2, 1332 (1995), C. W. Mendel, Jr. and S. E. Rosenthal, Phys. of Plasmas 3, 4207 (1996)] relativistic electron flow in cylindrical magnetically insulated transmission lines was analyzed and modeled under the assumption of negligible electron pressure. The model allows power flow in these lines to be accurately calculated under most conditions. The model was developed for coaxial right circular cylindrical electrodes. It is shown here that the model applies equally well to arbitrary cylindrical systems, i.e., systems consisting of electrodes of arbitrary cross section. © 1999 American Institute of Physics.
    Type of Medium: Electronic Resource
    URL: http://dx.doi.org/10.1063/1.873770
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  • 5
    Electronic Resource
    Electronic Resource
    Three-dimensional particle-in-cell simulations of applied-B ion diodes (1994)
    [S.l.] : American Institute of Physics (AIP)
    Physics of Plasmas 1 (1994), S. 429-443 
    Details
    ISSN: 1089-7674
    Source: AIP Digital Archive
    Topics: Physics
    Notes: The three-dimensional particle-in-cell code quicksilver [Seidel et al., Computational Physics, edited by A. Tenner (World Scientific, Singapore, 1991), p. 475] has been used to study applied-B ion diodes. The impedance behavior of the diode in these simulations is in good agreement with both analytic theory and experiments at peak power. The simulations also demonstrate the existence of electromagnetic instabilities which induce divergence in the ion beam. Early in time, there is an instability at high frequency relative to the ion transit time τi, and the resulting beam divergence is low. However, later in time, the system makes a transition to an instability with a frequency close to 1/τi, and the ion beam divergence rises to an unacceptably high value. The transition is associated with the build-up of electron space charge in the diode, and the resulting increase in the beam current density enhancement (J/JCL). Using different schemes to inhibit the electron evolution, the transition has both been postponed and permanently eliminated, resulting in Li+1 ion beams with a sustained divergence of ∼10 mrad at an energy of ∼10 MeV.
    Type of Medium: Electronic Resource
    URL: http://dx.doi.org/10.1063/1.870844
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  • 6
    Electronic Resource
    Electronic Resource
    Influence of gold thin-film interlayers on anodic bonding of copper microstructures produced by LIGA (1998)
    Springer
    Microsystem technologies 5 (1998), S. 100-104 
    Details
    ISSN: 1432-1858
    Source: Springer Online Journal Archives 1860-2000
    Topics: Electrical Engineering, Measurement and Control Technology , Technology
    Notes: Abstract  Neither pure copper nor solid gold can be anodically bonded to glass. It is only the gold coating on the copper which allows a joint to be built up as a result of the copper ions diffusing into the gold layer, but not many of them being able to migrate into the glass. To encapsulate microstructures produced by the LIGA technique, anodic bonding of gold-coated copper to Corning 0211-type glass was studied. For demonstration purposes, a glass platelet made of Corning 0211 was anodically bonded to a LIGA linear actuator consisting of electroplated copper coated with 1 μm of gold. A better understanding about the decisive parameters in anodic bonding was obtained by varying the bonding temperature and the thickness of the gold layer. Glass can be bonded on to the entire surface of gold layers 0.5–1 μm thick at temperatures as low as 300 °C; however, when the systems cool to room temperature, stress-induced cracks arise in the glass. On the other hand, thicker gold layers of 2.5 to 10 μm thickness require higher bonding temperatures for the same period of heating, but prevent the occurrence of such cracks because of their higher ductility.
    Type of Medium: Electronic Resource
    URL: http://dx.doi.org/10.1007/s005420050149
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  • 7
    Electronic Resource
    Electronic Resource
    Coupled-column HPLC analysis of free urinary catecholamines using restricted access affinity precolumn and micro-particulate nonporous silica analytical column (1995)
    Springer
    Chromatographia 41 (1995), S. 645-650 
    Details
    ISSN: 1612-1112
    Keywords: Coupled-column liquid chromatography ; Affinity chromatography ; Restricted access material ; Nonporous microparticulate silica ; Catecholamines
    Source: Springer Online Journal Archives 1860-2000
    Topics: Chemistry and Pharmacology
    Notes: Summary A coupled-column LC-method for fast, direct and routine quantitation of free parent catecholamines norepinephrine, epinephrine and dopamine in human urine has been developed. Direct injection of untreated samples followed by system-integrated, sample cleanup was achieved using a restricted-access affinity precolumn packed with a boronic acid-modified, copolymer support. Analytes were selectively extracted from the urine matrix at an alkaline pH by covalent affinity bonding. Desorption and transfer of the catecholamines to a nonporous, microparticulate-silica analytical column was by changing the pH of the mobile phase to an acidic value. Separation was by ion-pair RP-HPLC under aqueous conditions without addition of organic modifier. Analytes were detected by their natural fluorescence. Limits of quantitation were 5.57, 1.75 and 36.81 pmol for norepinephrine, epinephrine and dopamine, respectively. Urine levels could be quantified with a precision of about 2%. Mean recoveries of norepinephrine, epinephrine and dopamine were 98.18, 102.0 and 101.12%. Using a nonporous packing in the analytical column, analytical times and solvent consumption were reduced considerably compared to conventional porous silica columns.
    Type of Medium: Electronic Resource
    URL: http://dx.doi.org/10.1007/BF02267798
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  • 8
    Electronic Resource
    Electronic Resource
    Redox properties of cobalt(II) and methylcobalt(III) complexes with dianionic macrocyclic polychelate ligands (1993)
    Springer
    Russian chemical bulletin 42 (1993), S. 981-985 
    Details
    ISSN: 1573-9171
    Keywords: organometallic compounds ; cobalt—carbon bond ; redox potentials ; cobalt(IV)
    Source: Springer Online Journal Archives 1860-2000
    Topics: Chemistry and Pharmacology
    Notes: Abstract Redox potentials of a series of complexes of cobalt(II) and organocobalt(III) with tetraazamacrocyclic (N4) and N2O2-noncyclic polychelate ligands have been determined by cyclic voltammetry. Introduction of ano-phenylene fragment instead of an ethylene fragment into an equatorial ligand and/or exchange of an N4-coordination chromophore for the N2O2-analog has been shown to result in the anodic shift of redox potentials of MeCo(IV)L/ MeCo(III)L, MeCo(III)L/MeCo(II)L, and Co(II)L/Co(I)L pairs. It has been established that the solvent effect on redox potential is larger for Co(III)L/Co(II)L than for other pairs. Apparently, this is the first case when quasi-reversible stages of oxidation of MeCo(III)L to MeCo(IV)L+ and MeCo(IV)L+ to [MeCo(IV)L]2+ can be simultaneously observed. A. relatively stable complex of methylcobalt(IV) with a long lifetime at ∼20 °C has been registered by the ESR method.
    Type of Medium: Electronic Resource
    URL: http://dx.doi.org/10.1007/BF00704180
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  • 9
    Electronic Resource
    Electronic Resource
    027 Simplified chromatographic isolation of sex hormone-binding globulin from follicular fluid (1992)
    Springer
    Fresenius' Zeitschrift für analytische Chemie 343 (1992), S. 79-80 
    Details
    ISSN: 1618-2650
    Source: Springer Online Journal Archives 1860-2000
    Topics: Chemistry and Pharmacology
    Type of Medium: Electronic Resource
    URL: http://dx.doi.org/10.1007/BF00332021
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  • 10
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    Evolution and control of ion-beam divergence in applied-Bdiodes (1991)
    American Physical Society
    Details
    Publication Date: 1991-11-25
    Print ISSN: 0031-9007
    Electronic ISSN: 1079-7114
    Topics: Physics
    Published by American Physical Society
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