ISSN:
1662-9752
Source:
Scientific.Net: Materials Science & Technology / Trans Tech Publications Archiv 1984-2008
Topics:
Mechanical Engineering, Materials Science, Production Engineering, Mining and Metallurgy, Traffic Engineering, Precision Mechanics
Notes:
A sputter deposition chamber inserted into the six-circle Huber diffractometer of thematerials research station of the ROssendorf BeamLine (ROBL-CRG) at ESRF allowed to performin-situ experiments during film growth of Ni-Ti. It is equipped with Kapton windows for X-RayDiffraction (XRD) and specular Reflectivity (XRR) measurements. By following in situ theevolution of the structure of the growing film, we reveal intermediate “states” which cannot beseen/revealed ex situ, because those states occurred only during the growth but were no longervisible after deposition. Vertical Bragg-Brentano large-angle scattering geometry was employed tostudy the different trends of structural transformations taking place during deposition. Ni-Ti filmsexhibiting a non-uniform phase content across the film thickness could be produced by varying thepower of co-sputtering Ni-Ti plus Ti. A significant decrease of IB2{110}/IB2{200} was observed when abias of -45 V was applied
Type of Medium:
Electronic Resource
URL:
http://www.tib-hannover.de/fulltexts/2011/0528/02/12/transtech_doi~10.4028%252Fwww.scientific.net%252FMSF.514-516.1588.pdf
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