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  • 1
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    Localization of metastable atom beams with optical standing waves: nanolithography at the heisenberg limit (1998)
    American Association for the Advancement of Science (AAAS)
    Details
    Publication Date: 1998-06-11
    Description: The spatially dependent de-excitation of a beam of metastable argon atoms, traveling through an optical standing wave, produced a periodic array of localized metastable atoms with position and momentum spreads approaching the limit stated by the Heisenberg uncertainty principle. Silicon and silicon dioxide substrates placed in the path of the atom beam were patterned by the metastable atoms. The de-excitation of metastable atoms upon collision with the surface promoted the deposition of a carbonaceous film from a vapor-phase hydrocarbon precursor. The resulting patterns were imaged both directly and after chemical etching. Thus, quantum-mechanical steady-state atom distributions can be used for sub-0.1-micrometer lithography.〈br /〉〈span class="detail_caption"〉Notes: 〈/span〉Johnson -- Thywissen -- Dekker -- Berggren -- Chu -- Younkin -- Prentiss -- New York, N.Y. -- Science. 1998 Jun 5;280(5369):1583-6.〈br /〉〈span class="detail_caption"〉Author address: 〈/span〉Department of Physics, Harvard University, Cambridge, MA 02138, USA.〈br /〉〈span class="detail_caption"〉Record origin:〈/span〉 〈a href="http://www.ncbi.nlm.nih.gov/pubmed/9616117" target="_blank"〉PubMed〈/a〉
    Print ISSN: 0036-8075
    Electronic ISSN: 1095-9203
    Topics: Biology , Chemistry and Pharmacology , Computer Science , Medicine , Natural Sciences in General , Physics
    Published by American Association for the Advancement of Science (AAAS)
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  • 2
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    Microlithography by using neutral metastable atoms and self-assembled monolayers (1995)
    American Association for the Advancement of Science (AAAS)
    Details
    Publication Date: 1995-09-01
    Description: Lithography can be performed with beams of neutral atoms in metastable excited states to pattern self-assembled monolayers (SAMs) of alkanethiolates on gold. An estimated exposure of a SAM of dodecanethiolate (DDT) to 15 to 20 metastable argon atoms per DDT molecule damaged the SAM sufficiently to allow penetration of an aqueous solution of ferricyanide to the surface of the gold. This solution etched the gold and transformed the patterns in the SAMs into structures of gold; these structures had edge resolution of less than 100 nanometers. Regions of SAMs as large as 2 square centimeters were patterned by exposure to a beam of metastable argon atoms. These observations suggest that this system may be useful in new forms of micro- and nanolithography.〈br /〉〈span class="detail_caption"〉Notes: 〈/span〉Berggren, K K -- Bard, A -- Wilbur, J L -- Gillaspy, J D -- Helg, A G -- McClelland, J J -- Rolston, S L -- Phillips, W D -- Prentiss, M -- Whitesides, G M -- 1-F32 GM16511-01/GM/NIGMS NIH HHS/ -- New York, N.Y. -- Science. 1995 Sep 1;269(5228):1255-7.〈br /〉〈span class="detail_caption"〉Author address: 〈/span〉Department of Physics, Harvard University, Cambridge, MA 02138, USA.〈br /〉〈span class="detail_caption"〉Record origin:〈/span〉 〈a href="http://www.ncbi.nlm.nih.gov/pubmed/7652572" target="_blank"〉PubMed〈/a〉
    Keywords: Argon ; *Chemistry, Physical ; Ferricyanides ; *Gold ; Microscopy, Electron/instrumentation ; Physicochemical Phenomena ; *Sulfhydryl Compounds ; *Surface Properties
    Print ISSN: 0036-8075
    Electronic ISSN: 1095-9203
    Topics: Biology , Chemistry and Pharmacology , Computer Science , Medicine , Natural Sciences in General , Physics
    Published by American Association for the Advancement of Science (AAAS)
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  • 3
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    Complex Optical Surfaces Formed by Replica Molding Against Elastomeric Masters (1996)
    American Association for the Advancement of Science (AAAS)
    Details
    Publication Date: 1996-07-19
    Description: Complex, optically functional surfaces in organic polymers can be fabricated by replicating relief structures present on the surface of an elastomeric master with an ultraviolet or thermally curable organic polymer, while the master is deformed by compression, bending, or stretching. The versatility of this procedure for fabricating surfaces with complex, micrometer- and submicrometer-scale patterns was demonstrated by the production of (i) diffraction gratings with periods smaller than the original grating; (ii) chirped, blazed diffraction gratings (where the period of a chirped grating changes continuously with position) on planar and curved surfaces; (iii) patterned microfeatures on the surfaces of approximately hemispherical objects (for example, an optical surface similar to a fly's eye); and (iv) arrays of rhombic microlenses. These topologically complex, micropatterned surfaces are difficult to fabricate with other techniques.〈br /〉〈span class="detail_caption"〉Notes: 〈/span〉Xia -- Kim -- Zhao -- Rogers -- Prentiss -- Whitesides -- New York, N.Y. -- Science. 1996 Jul 19;273(5273):347-9.〈br /〉〈span class="detail_caption"〉Author address: 〈/span〉Y. Xia, E. Kim, X.-M. Zhao, J. A. Rogers, G. M. Whitesides, Department of Chemistry, Harvard University, Cambridge, MA 02138, USA. M. Prentiss, Department of Physics, Harvard University, Cambridge, MA 02138, USA.〈br /〉〈span class="detail_caption"〉Record origin:〈/span〉 〈a href="http://www.ncbi.nlm.nih.gov/pubmed/8662519" target="_blank"〉PubMed〈/a〉
    Print ISSN: 0036-8075
    Electronic ISSN: 1095-9203
    Topics: Biology , Chemistry and Pharmacology , Computer Science , Medicine , Natural Sciences in General , Physics
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  • 4
    Electronic Resource
    Electronic Resource
    Guided microfluidics by electromagnetic capillary focusing (2002)
    Woodbury, NY : American Institute of Physics (AIP)
    Applied Physics Letters 80 (2002), S. 1483-1485 
    Details
    ISSN: 1077-3118
    Source: AIP Digital Archive
    Topics: Physics
    Notes: As fluid channel sizes are reduced, nonspecific binding to channel walls and particle clogging of microchannels present key obstacles thus far limiting the application of microfluidic lab-on-a-chip technologies. Here we show how combining applied electric or magnetic fields with the increasing surface tension effects inherent in channel miniaturization can guide particle flow and prevent adhesion to channel walls. We demonstrate effective two-dimensional particle focusing within arbitrary channel geometries that prevents adhesion, allowing accurate control of Poiseuille flow effects, and acts as either a robust particle accumulator or a separator. © 2002 American Institute of Physics.
    Type of Medium: Electronic Resource
    URL: http://dx.doi.org/10.1063/1.1449531
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  • 5
    Electronic Resource
    Electronic Resource
    Micro-electromagnets for atom manipulation (1998)
    Woodbury, NY : American Institute of Physics (AIP)
    Applied Physics Letters 72 (1998), S. 2906-2908 
    Details
    ISSN: 1077-3118
    Source: AIP Digital Archive
    Topics: Physics
    Notes: Micro-electromagnets for atom manipulation have been constructed, including magnetic mirrors (serpentine patterns) and traps (circular patterns). They consist of planar micron-scale Au wires on sapphire substrates fabricated using lithography and electroplating. At liquid nitrogen or helium temperatures in vacuum the wires support currents of several amperes with current density ∼108 A/cm2 and power dissipation ∼10 kW/cm2, and they produce magnetic fields to 0.3 T and gradients to 103 T/cm. The micro-electromagnet mirror was used to deflect a beam of metastable helium atoms at grazing angles ∼0.5 mrad. © 1998 American Institute of Physics.
    Type of Medium: Electronic Resource
    URL: http://dx.doi.org/10.1063/1.121455
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  • 6
    Electronic Resource
    Electronic Resource
    Nanostructure fabrication in silicon using cesium to pattern a self-assembled monolayer (1997)
    Woodbury, NY : American Institute of Physics (AIP)
    Applied Physics Letters 71 (1997), S. 1261-1263 
    Details
    ISSN: 1077-3118
    Source: AIP Digital Archive
    Topics: Physics
    Notes: This letter describes the formation of nanometer-scale features in a silicon substrate using a self-assembled monolayer (SAM) of octylsiloxane on silicon dioxide as a resist sensitive to a patterned beam of neutral cesium atoms. The mask that patterned the atomic beam was a silicon nitride membrane perforated with nm and μm scale holes, in contact with the substrate surface. In a two-step wet-chemical etching process, the pattern formed in the SAM was transferred first into the SiO2 layer and then into an underlying silicon substrate. This process demonstrated the formation of silicon features with diameter ∼60 nm. © 1997 American Institute of Physics.
    Type of Medium: Electronic Resource
    URL: http://dx.doi.org/10.1063/1.119867
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  • 7
    Electronic Resource
    Electronic Resource
    Using neutral metastable argon atoms and contamination lithography to form nanostructures in silicon, silicon dioxide, and gold (1996)
    Woodbury, NY : American Institute of Physics (AIP)
    Applied Physics Letters 69 (1996), S. 2773-2775 
    Details
    ISSN: 1077-3118
    Source: AIP Digital Archive
    Topics: Physics
    Notes: This letter describes the fabrication of ∼80 nm structures in silicon, silicon dioxide, and gold substrates by exposing the substrates to a beam of metastable argon atoms in the presence of dilute vapors of trimethylpentaphenyltrisiloxane, the dominant constituent of diffusion pump oil used in these experiments. The atoms release their internal energy upon contacting the siloxanes physisorbed on the surface of the substrate, and this release causes the formation of a carbon-based resist. The atomic beam was patterned by a silicon nitride membrane, and the pattern formed in the resist material was transferred to the substrates by chemical etching. Simultaneous exposure of large areas (44 cm2) was also demonstrated. © 1996 American Institute of Physics.
    Type of Medium: Electronic Resource
    URL: http://dx.doi.org/10.1063/1.117671
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  • 8
    Electronic Resource
    Electronic Resource
    Using light as a stencil (1992)
    Woodbury, NY : American Institute of Physics (AIP)
    Applied Physics Letters 60 (1992), S. 1027-1029 
    Details
    ISSN: 1077-3118
    Source: AIP Digital Archive
    Topics: Physics
    Notes: A new method for laterally manipulating the morphology of a thin film is presented, which uses the force exerted by light to deflect neutral atoms in an atomic beam during deposition. We have evaluated the dependence of the thickness of a thin metal film on the frequency, intensity, and the spatial structure of the light field, and find that the stimulated component of the force is suitable for laterally organizing atoms from centimeter to submicron dimensions.
    Type of Medium: Electronic Resource
    URL: http://dx.doi.org/10.1063/1.106488
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  • 9
    Electronic Resource
    Electronic Resource
    Improving the specularity of magnetic mirrors for atoms (1999)
    Springer
    The European physical journal 7 (1999), S. 351-359 
    Details
    ISSN: 1434-6079
    Keywords: PACS. 03.75.Be Atom and neutron optics - 32.80.Pj Optical cooling of atoms; trapping - 85.70.Ay Magnetic device characterization, design, and modeling
    Source: Springer Online Journal Archives 1860-2000
    Topics: Physics
    Notes: Abstract: An array of anti-parallel current-carrying wires creates an inhomogeneous magnetic field capable of reflecting neutral atoms. We present analytical and numerical analyses of the magnetic field produced by such an array, and describe methods for reducing the resulting rms angular deviation from specular reflection to less than 0.1 mrad. Careful choice of cross-sectional wire profiles is shown to dramatically improve specularity of reflection close to the surface. Additionally, we find that the specularity depends on whether the number of wires in the mirror is even or odd, and that there exists an optimal turning height above the surface that maximizes the specularity of reflection from the mirror.
    Type of Medium: Electronic Resource
    URL: http://dx.doi.org/10.1007/s100530050578
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  • 10
    Electronic Resource
    Electronic Resource
    Microfabricated magnetic waveguides for neutral atoms (1999)
    Springer
    The European physical journal 7 (1999), S. 361-367 
    Details
    ISSN: 1434-6079
    Keywords: PACS. 03.75.Be Atom and neutron optics - 32.80.Pj Optical cooling of atoms; trapping
    Source: Springer Online Journal Archives 1860-2000
    Topics: Physics
    Notes: Abstract: We describe how tightly confining magnetic waveguides for atoms can be created with microfabricated or nanofabricated wires. Rubidium atoms guided in the devices we have fabricated would have a transverse mode energy spacing of K. We discuss the creation of a single-mode waveguide for atom interferometry whose depth is comparable to magneto-optical trap (MOT) temperatures. We also discuss the application of microfabricated waveguides to low-dimensional systems of quantum degenerate gases, and show that confinement can be strong enough to observe fermionization in a strongly interacting bosonic ensemble.
    Type of Medium: Electronic Resource
    URL: http://dx.doi.org/10.1007/s100530050579
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