ISSN:
1662-9752
Source:
Scientific.Net: Materials Science & Technology / Trans Tech Publications Archiv 1984-2008
Topics:
Mechanical Engineering, Materials Science, Production Engineering, Mining and Metallurgy, Traffic Engineering, Precision Mechanics
Notes:
Polycrystalline diamond layers are mostly used in various fields of industrial application.Mechanical tension is generated due to the different heat expansion coefficients of thesubstrate and the layer, which leads to fracturing in some cases. In this work a homogeneouspolycrystalline diamond structure has been deposited on Si/SiO2 substrate by microwaveassisted CVD method (MW-PECVD). An selective etching technique has been used toremove the silicon below the 2.5 micron thick diamond layer. A self-supporting diamondstructure has been created this way. Polycrystalline diamond based heaters and thermometerscan be made from doped diamond materials, which can resist corrosive and radiativeenvironment
Type of Medium:
Electronic Resource
URL:
http://www.tib-hannover.de/fulltexts/2011/0528/02/14/transtech_doi~10.4028%252Fwww.scientific.net%252FMSF.537-538.145.pdf
Permalink