ISSN:
1662-8985
Source:
Scientific.Net: Materials Science & Technology / Trans Tech Publications Archiv 1984-2008
Topics:
Mechanical Engineering, Materials Science, Production Engineering, Mining and Metallurgy, Traffic Engineering, Precision Mechanics
Notes:
The reliable reproducibility of nano patterns or other nano structures is one of many issuesin the nano-imprint lithography process. An important prerequisite for reproducibility is suitableadhesion properties of adhesion promoters or anti-sticking layer. In this study, rhombus shapedsymmetrical probe with a flat tip was developed and fabricated using MEMS fabrication technique.For the experimental setup of the adhesion test using a UV curable PAK01 resin coated AFM tip withseveral adhesion promoters, the flat tip is covered by PAK01 resist using micromanipulator.Anti-sticking layers of silane agents were prepared on the tip by vapor deposition method. Adhesionforce between various adhesion promoters (GPTS, APMDS, APTS, DUV30J, O2 planairzation) andPAK01 resist and the force between anti-sticking layer (FOTS, DDMS) and PAK01 resist wereevaluated using the force-distance mode of AFM. Adhesion force of GPTS and FOTS are about 7180nN and 1660 nN, respectively
Type of Medium:
Electronic Resource
URL:
http://www.tib-hannover.de/fulltexts/2011/0528/01/40/transtech_doi~10.4028%252Fwww.scientific.net%252FAMR.26-28.1113.pdf
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