ISSN:
1090-6533
Source:
Springer Online Journal Archives 1860-2000
Topics:
Physics
Notes:
Abstract Plasma-deposited zinc oxide films were studied and it was established that oxide molecules may form and their clusters nucleate within a recombination burning zone in the volume of plasma, provided that the ion range does not exceed the size of a discharge chamber. The nucleation zone is rather narrow and its position depends on the gas pressure in the chamber. The zinc oxide films grown in this zone possess a texture with small misorientation angle and are characterized by small thickness of the nucleation texture and high piezoelectric activity.
Type of Medium:
Electronic Resource
URL:
http://dx.doi.org/10.1134/1.1262818
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