Abstract
Plasma-deposited zinc oxide films were studied and it was established that oxide molecules may form and their clusters nucleate within a recombination burning zone in the volume of plasma, provided that the ion range does not exceed the size of a discharge chamber. The nucleation zone is rather narrow and its position depends on the gas pressure in the chamber. The zinc oxide films grown in this zone possess a texture with small misorientation angle and are characterized by small thickness of the nucleation texture and high piezoelectric activity.
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B. S. Danilin and V. K. Syrchin, Magnetron Sputtering Systems (Radio i Svyaz’, Moscow, 1982).
Handbook of Thin-Film Technology, Ed. by L. I. Maissel and R. Glang (McGraw-Hill, New York, 1970; Sov. Radio, Moscow, 1977), Vol. 2.
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Translated from Pis’ma v Zhurnal Tekhnichesko\(\overset{\lower0.5em\hbox{$\smash{\scriptscriptstyle\smile}$}}{l} \) Fiziki, Vol. 26, No. 7, 2000, pp. 31–34.
Original Russian Text Copyright © 2000 by Burylin, Veselov, Veselov, Dzhumaliev, Ivanov, Kiryasova.
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Burylin, E.I., Veselov, A.A., Veselov, A.G. et al. Zinc oxide molecules and clusters formed in a quasiclosed volume of reactive gas-discharge plasma. Tech. Phys. Lett. 26, 282–283 (2000). https://doi.org/10.1134/1.1262818
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DOI: https://doi.org/10.1134/1.1262818