Electronic Resource
[S.l.]
:
American Institute of Physics (AIP)
Journal of Applied Physics
91 (2002), S. 36-39
ISSN:
1089-7550
Source:
AIP Digital Archive
Topics:
Physics
Notes:
A drift tube-double mass spectrometer technique has been used to study the transport of CF3+ in CF4 and of CHF2+ in CHF3. The reduced mobilities of these two ions were measured over the density-normalized electric field strength E/N, between 30 and 750 Td (1 Td=10−17 V cm2). It was found that substantial amounts of C+ were produced thorugh the reaction of CF3+ with Ar. Thus, the mobility of C+ could be measured over the E/N range from 30 to 260 Td. Further measurements of the abundance of secondary ions formed by the reactions of CF3+ and CHF2+ with Ar revealed that for E/N〉250 Td and E/N〉120 Td, respectively, Ar+ predominates as a secondary species over F+, CF+, CF2+, and ArH+. The injection of Ar+ into CF4 was also found to be a very efficient dissociative charge transfer process, leading predominantly to CF3+ formation, with conversion efficiencies of practically 100% for E/N〉100 Td. The above finding is consistent with a previous beam study. © 2002 American Institute of Physics.
Type of Medium:
Electronic Resource
URL:
http://dx.doi.org/10.1063/1.1421034
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