Publication Date:
2018-02-23
Description:
Sensors, Vol. 18, Pages 643: Structural Designing of a MEMS Capacitive Accelerometer for Low Temperature Coefficient and High Linearity Sensors doi: 10.3390/s18020643 Authors: Jiangbo He Wu Zhou Huijun Yu Xiaoping He Peng Peng The low temperature coefficient and high linearity of the input-output characteristics are both required for high-performance microelectromechanical systems (MEMS) capacitive accelerometers. In this work, a structural designing of a bulk MEMS capacitive accelerometer is developed for both low temperature coefficient and high linearity. Firstly, the contrary effect of the wide-narrow gaps ratio (WNGR) on the temperature coefficient of the scale factor (TCSF) and linearity error is discussed. Secondly, the ability of an improved structure that can avoid the contrary effect is illustrated. The improved structure is proposed in our previous work for reducing the temperature coefficient of bias (TCB) and TCSF. Within the improved structure, both the TCSF and linearity error decrease with increasing WNGR. Then, the precise designing of the improved structure is developed for achieving lower TCB, TCSF, and linearity error. Finally, the precise structural designing is experimentally verified.
Electronic ISSN:
1424-8220
Topics:
Chemistry and Pharmacology
,
Electrical Engineering, Measurement and Control Technology
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