ISSN:
1662-9752
Source:
Scientific.Net: Materials Science & Technology / Trans Tech Publications Archiv 1984-2008
Topics:
Mechanical Engineering, Materials Science, Production Engineering, Mining and Metallurgy, Traffic Engineering, Precision Mechanics
Notes:
We report an experimental investigation of the pits formed at oxidation. The pits wereformed by a long time oxidation in a dry or wet atmosphere at high temperature (~ 1200 oC).Although they were observed in (0001) face, they were not in (000-1) face. Comparing the points ofoxidation pits to those of molten KOH etching pits on the same area of the substrate, we show thatthe oxidation pits are formed by oxidizing defects. In addition, the influence of the oxidation pits tothe reliability of thermal oxide was researched
Type of Medium:
Electronic Resource
URL:
http://www.tib-hannover.de/fulltexts/2011/0528/02/20/transtech_doi~10.4028%252Fwww.scientific.net%252FMSF.600-603.377.pdf
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