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  • 1
    Electronic Resource
    Electronic Resource
    Multicusp sources for ion beam projection lithography : Proceedings of the 7th international conference on ion sources (1998)
    [S.l.] : American Institute of Physics (AIP)
    Review of Scientific Instruments 69 (1998), S. 877-879 
    Details
    ISSN: 1089-7623
    Source: AIP Digital Archive
    Topics: Physics , Electrical Engineering, Measurement and Control Technology
    Notes: Multicusp ion sources are capable of producing positive and negative ions with good beam quality and low energy spread. The ion energy spread of multicusp sources has been measured by three different techniques. The axial ion energy spread has been reduced by introducing a magnetic filter inside the multicusp source chamber which adjusts the plasma potential distribution. The axial energy spread is further reduced by optimizing the source configuration. Values as low as 0.8 eV have been achieved. © 1998 American Institute of Physics.
    Type of Medium: Electronic Resource
    URL: http://dx.doi.org/10.1063/1.1148469
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  • 2
    Electronic Resource
    Electronic Resource
    Plasma production via laser-induced photoemissiona) (1996)
    [S.l.] : American Institute of Physics (AIP)
    Review of Scientific Instruments 67 (1996), S. 1666-1669 
    Details
    ISSN: 1089-7623
    Source: AIP Digital Archive
    Topics: Physics , Electrical Engineering, Measurement and Control Technology
    Notes: The feasibility of laser-induced photoemission as a driving mechanism for short plasma pulse production is currently being investigated with a pulsed excimer laser at 248 nm. Low work function materials such as LaB6 and barium are used as cathode materials and the resulting plasma characteristics are being examined. Results from early measurements of the barium photocathode show a strong dependence of the photoemitted current on the source pressure and cathode voltage. Additionally, the temporal behavior of the emitted electron pulse is found to consist of two components: a short 50 ns burst corresponding to laser-induced photoemission, and a larger, longer 100 ns pulse increasing from the tail end of the photoemitted electron pulse. © 1996 American Institute of Physics.
    Type of Medium: Electronic Resource
    URL: http://dx.doi.org/10.1063/1.1146913
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  • 3
    Electronic Resource
    Electronic Resource
    Plasma production via laser-induced photoemission (abstract) : Proceedings of the 6th international conference on in sources (1996)
    [S.l.] : American Institute of Physics (AIP)
    Review of Scientific Instruments 67 (1996), S. 1340-1340 
    Details
    ISSN: 1089-7623
    Source: AIP Digital Archive
    Topics: Physics , Electrical Engineering, Measurement and Control Technology
    Notes: The feasibility of laser-induced photoemission as a driving mechanism for short plasma pulse production is currently being investigated with a pulsed excimer laser at 248 nm. Low work function materials such as LaB6 and barium are used as cathode materials and the resulting plasma characteristics are being examined. Results from early measurements of the barium photocathode show a strong dependence of the photoemitted current on the source pressure and cathode voltage. Additionally, the temporal behavior of the emitted electron pulse is found to consist of two components: a short 50 ns burst corresponding to laser-induced photoemission, and a larger, longer 100 ns pulse increasing from the tail end of the photoemitted electron pulse. © 1996 American Institute of Physics.
    Type of Medium: Electronic Resource
    URL: http://dx.doi.org/10.1063/1.1147244
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  • 4
    Electronic Resource
    Electronic Resource
    Ion energy spread and current measurements of the rf-driven multicusp ion source (1997)
    [S.l.] : American Institute of Physics (AIP)
    Review of Scientific Instruments 68 (1997), S. 1398-1402 
    Details
    ISSN: 1089-7623
    Source: AIP Digital Archive
    Topics: Physics , Electrical Engineering, Measurement and Control Technology
    Notes: Axial energy spread and useful beam current of positive ion beams have been carried out using a radio frequency (rf)-driven multicusp ion source. Operating the source with a 13.56 MHz induction discharge, the axial energy spread is found to be approximately 3.2 eV. The extractable beam current of the rf-driven source is found to be comparable to that of filament-discharge sources. With a 0.6 mm diameter extraction aperture, a positive hydrogen ion beam current density of 80 mA/cm2 can be obtained at a rf input power of 2.5 kW. The expected source lifetime is much longer than that of filament discharges. © 1997 American Institute of Physics.
    Type of Medium: Electronic Resource
    URL: http://dx.doi.org/10.1063/1.1147948
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  • 5
    Electronic Resource
    Electronic Resource
    Production of H− ions with addition of cesium or xenon to a hydrogen discharge in a small multicusp ion source (1988)
    [S.l.] : American Institute of Physics (AIP)
    Journal of Applied Physics 64 (1988), S. 3424-3428 
    Details
    ISSN: 1089-7550
    Source: AIP Digital Archive
    Topics: Physics
    Notes: The effect on H− ion production by adding cesium or xenon to a hydrogen discharge, in a small magnetically filtered multicusp ion source, has been investigated. Addition of cesium vapor to the hydrogen discharge resulted in a factor of 16 increase in H− output relative to the uncesiated discharge for the same operating parameters. Likewise, the addition of xenon gas to a hydrogen discharge resulted in a factor of 2.7 increase in H− output over pure hydrogen operation at optimum H2 source pressure, while maintaining the same arc parameters. Operation of the source with the plasma electrode at optimum bias voltage was essential to obtain this result.
    Type of Medium: Electronic Resource
    URL: http://dx.doi.org/10.1063/1.341498
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  • 6
    Electronic Resource
    Electronic Resource
    Production of atomic or molecular nitrogen ion beams using a multicusp and a microwave ion source (1988)
    [S.l.] : American Institute of Physics (AIP)
    Journal of Applied Physics 63 (1988), S. 5678-5682 
    Details
    ISSN: 1089-7550
    Source: AIP Digital Archive
    Topics: Physics
    Notes: Two small ion sources have been used to generate positive nitrogen ion beams. One is a multicusp ion source, the other is a compact microwave ion source which needs no magnetic field for operation. Both sources are operated with and without a magnetic filter to control the energetic electron population near the extraction region. Results for both ion sources, including current densities and ionic species mix are presented. The multicusp ion source can produce beams of nitrogen ions with greater than 90% of the ion species either N+ or N+2 with current densities of ∼8 and 2.5 mA/cm2, respectively. The microwave ion source can generate nitrogen ion beams composed of more than 85% N+2 with current densities of ∼30 mA/cm2.
    Type of Medium: Electronic Resource
    URL: http://dx.doi.org/10.1063/1.340302
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  • 7
    Electronic Resource
    Electronic Resource
    Development of low-energy oxygen ion beams for surface studies (1986)
    [S.l.] : American Institute of Physics (AIP)
    Journal of Applied Physics 60 (1986), S. 3015-3017 
    Details
    ISSN: 1089-7550
    Source: AIP Digital Archive
    Topics: Physics
    Notes: A small microwave ion source has been constructed to generate low-energy (5–10 eV) oxygen beams. The source is fabricated from a quartz tube and is enclosed by a microwave cavity. The source is operated without an external extraction voltage. Positive ions effuse from the source with energies equal to the plasma potential. The source has been operated in a cw mode producing an atomic oxygen ion fluence 〉1×1014 cm−2 s−1 with energies as low as 5.5 eV. The "self-extracted'' ion beam can be used to simulate the oxygen environment encountered in low earth orbits.
    Type of Medium: Electronic Resource
    URL: http://dx.doi.org/10.1063/1.337755
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  • 8
    Electronic Resource
    Electronic Resource
    Modeling of H− surface conversion sources; binary (H-Ba) and ternary (H-Cs/W) converter arrangements (1991)
    [S.l.] : American Institute of Physics (AIP)
    Journal of Applied Physics 70 (1991), S. 2575-2583 
    Details
    ISSN: 1089-7550
    Source: AIP Digital Archive
    Topics: Physics
    Notes: The production process for the formation of H− ions in a surface conversion source is sputtering of hydrogen atoms from the converter surface layers by incident positive ions, followed by electron attachment via resonant charge exchange with the converter surface. The sputtering process is in direct relation to the converter surface composition. New experimental data led us to identify two different classes of converters: metallic converters, like solid barium(binary) and adlayer converters, like cesium on tungsten (ternary). For a binary converter the hydrogen in the surface layers is directly sputtered by the incoming ions. Consequently, the negative ion yield scales with the hydrogen concentration in the surface layers. In the cesium/tungsten system (ternary) the hydrogen at the surface is believed to be sandwiched between the cesium adlayer and the tungsten surface. Hence, the negative ion yield scales with the sputter coefficient of hydrogen on adsorbed cesium. This is experimentally confirmed.
    Type of Medium: Electronic Resource
    URL: http://dx.doi.org/10.1063/1.349365
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  • 9
    Electronic Resource
    Electronic Resource
    Plasma-generator-induced effects on the dynamics of a negative-ion surface conversion source (1991)
    [S.l.] : American Institute of Physics (AIP)
    Journal of Applied Physics 69 (1991), S. 3485-3493 
    Details
    ISSN: 1089-7550
    Source: AIP Digital Archive
    Topics: Physics
    Notes: The production of H− ions at a barium, magnesium, strontium, molybdenum, and lanthanum-hexaboride converter immersed in a hydrogen plasma have been investigated for pulsed and dc discharges. The scaling of the negative-ion output with incident positive-ion current on the converter depends greatly on the actual geometry and type of plasma generator. A less than linear scaling is observed in a multicusp system using filaments or rf to generate the discharge. A more than linear scaling is obtained in a configuration where the filament and the converter are separated by a permanent-magnet filter. For a rf plasma generator, there is a pronounced optimum in the relative position of antenna and converter.
    Type of Medium: Electronic Resource
    URL: http://dx.doi.org/10.1063/1.348489
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  • 10
    Electronic Resource
    Electronic Resource
    H− enhancement process in a multicusp ion source operated with a barium insert structure (1991)
    Woodbury, NY : American Institute of Physics (AIP)
    Applied Physics Letters 58 (1991), S. 1467-1469 
    Details
    ISSN: 1077-3118
    Source: AIP Digital Archive
    Topics: Physics
    Notes: It has been demonstrated that the H− output current from a small multicusp source can be substantially enhanced if the hydrogen plasma is seeded with barium. Operating with a barium washer insert at the extraction aperture, it is found that the extractable H− current is increased by a factor of 3 if the insert bias potential is optimized. By use of a mixture of xenon and hydrogen gas, it is further demonstrated that the positive hydrogen ions are responsible for the observed H− enhancement.
    Type of Medium: Electronic Resource
    URL: http://dx.doi.org/10.1063/1.105199
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