Publication Date:
1995-09-01
Description:
Lithography can be performed with beams of neutral atoms in metastable excited states to pattern self-assembled monolayers (SAMs) of alkanethiolates on gold. An estimated exposure of a SAM of dodecanethiolate (DDT) to 15 to 20 metastable argon atoms per DDT molecule damaged the SAM sufficiently to allow penetration of an aqueous solution of ferricyanide to the surface of the gold. This solution etched the gold and transformed the patterns in the SAMs into structures of gold; these structures had edge resolution of less than 100 nanometers. Regions of SAMs as large as 2 square centimeters were patterned by exposure to a beam of metastable argon atoms. These observations suggest that this system may be useful in new forms of micro- and nanolithography.〈br /〉〈span class="detail_caption"〉Notes: 〈/span〉Berggren, K K -- Bard, A -- Wilbur, J L -- Gillaspy, J D -- Helg, A G -- McClelland, J J -- Rolston, S L -- Phillips, W D -- Prentiss, M -- Whitesides, G M -- 1-F32 GM16511-01/GM/NIGMS NIH HHS/ -- New York, N.Y. -- Science. 1995 Sep 1;269(5228):1255-7.〈br /〉〈span class="detail_caption"〉Author address: 〈/span〉Department of Physics, Harvard University, Cambridge, MA 02138, USA.〈br /〉〈span class="detail_caption"〉Record origin:〈/span〉 〈a href="http://www.ncbi.nlm.nih.gov/pubmed/7652572" target="_blank"〉PubMed〈/a〉
Keywords:
Argon
;
*Chemistry, Physical
;
Ferricyanides
;
*Gold
;
Microscopy, Electron/instrumentation
;
Physicochemical Phenomena
;
*Sulfhydryl Compounds
;
*Surface Properties
Print ISSN:
0036-8075
Electronic ISSN:
1095-9203
Topics:
Biology
,
Chemistry and Pharmacology
,
Computer Science
,
Medicine
,
Natural Sciences in General
,
Physics
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