Electronic Resource
[S.l.]
:
American Institute of Physics (AIP)
Journal of Applied Physics
77 (1995), S. 1766-1770
ISSN:
1089-7550
Source:
AIP Digital Archive
Topics:
Physics
Notes:
A structural model of a-Si and a model for its transient phases have been proposed. In these models, it is assumed that a-Si is composed of many small regions (or clusters with a radius of about 50 A(ring)) having different free energies. When a-Si is rapidly heated to a temperature slightly less than 1450 K so as to avoid crystallization, it transforms to a new phase in which both a-Si clusters and super-cooled l-Si coexist. By using these models, anomalous phenomena observed in explosive crystallization and enhanced diffusion phenomena in rapid thermal annealing (RTA) process can be explained. Furthermore, the viscosity of super-cooled Si fluid at 1000 °C induced by the RTA process is estimated to be 107–108 mPa s, which leads to the determination of T0 value of about 1300 K in Vogel–Fulcher–Tammann (VFT) relation. However, this T0 value differs from that previously reported. This discrepancy has been discussed and it is concluded that T0 in the VFT relation is not a constant but a function of (dT/dt). © 1995 American Institute of Physics.
Type of Medium:
Electronic Resource
URL:
http://dx.doi.org/10.1063/1.358872
Permalink
|
Location |
Call Number |
Expected |
Availability |