ALBERT — All Library Books, journals and Electronic Records Telegrafenberg

Hits per page

hit 1 - 1 | 1 hit

Select All Export

Unknown

Laser furnace and method for zone refining of semiconductor wafers (1988)

Penn, Wayne M. ; Griner, Donald B. ; zur Burg, Frederick W.

In: CASI

add to mindlist on the mindlist

Details

Publication Date: 2019-08-15

Description: A method of zone refining a crystal wafer (116 FIG. 1) comprising the steps of focusing a laser beam to a small spot (120) of selectable size on the surface of the crystal wafer (116) to melt a spot on the crystal wafer, scanning the small laser beam spot back and forth across the surface of the crystal wafer (116) at a constant velocity, and moving the scanning laser beam across a predetermined zone of the surface of the crystal wafer (116) in a direction normal to the laser beam scanning direction and at a selectible velocity to melt and refine the entire crystal wafer (116).

Keywords: Solid-State Physics

Format: application/pdf

	Location	Call Number	Expected	Availability

Others were also interested in ...

NASA TECHNICAL REPORTS

S·F·X

Overview

hit 1 - 1 | 1 hit