ALBERT — All Library Books, journals and Electronic Records Telegrafenberg

Hits per page

hit 1 - 1 | 1 hit

Select All Export

Unknown

A measurement technique of time-dependent dielectric breakdown in MOS capacitors (1974)

Li, S. P.

In: Other Sources

add to mindlist on the mindlist

Details

Publication Date: 2019-06-27

Description: The statistical nature of time-dependent dielectric breakdown characteristics in MOS capacitors was evidenced by testing large numbers of capacitors fabricated on single wafers. A multipoint probe and automatic electronic visual display technique are introduced that will yield statistical results which are necessary for the investigation of temperature, electric field, thermal annealing, and radiation effects in the breakdown characteristics, and an interpretation of the physical mechanisms involved. It is shown that capacitors of area greater than 0.002 sq cm may yield worst-case results, and that a multipoint probe of capacitors of smaller sizes can be used to obtain a profile of nonuniformities in the SiO2 films.

Keywords: ELECTRONICS AND ELECTRICAL ENGINEERING

Type: Microelectronics and Reliability; 13; June 197

Format: text

	Location	Call Number	Expected	Availability

Others were also interested in ...

NASA TECHNICAL REPORTS

S·F·X

hit 1 - 1 | 1 hit