Electronic Resource
s.l. ; Stafa-Zurich, Switzerland
Solid state phenomena
Vol. 134 (Nov. 2007), p. 237-240
ISSN:
1662-9779
Source:
Scientific.Net: Materials Science & Technology / Trans Tech Publications Archiv 1984-2008
Topics:
Physics
Notes:
Ozonated DI water was supplied to make alkaline cleaning solutions to replace SC1 chemicals in abath with and without recirculation. With recirculation, low dissolved ozone and low pH cause lowerparticle removal efficiency (PRE) of 75%. However, direct supply of ozonated water with NH4OH toa bath without recirculation resulted in higher PRE over 93 %
Type of Medium:
Electronic Resource
URL:
http://www.tib-hannover.de/fulltexts/2011/0528/02/24/transtech_doi~10.4028%252Fwww.scientific.net%252FSSP.134.237.pdf
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