Electronic Resource
s.l. ; Stafa-Zurich, Switzerland
Solid state phenomena
Vol. 121-123 (Mar. 2007), p. 603-606
ISSN:
1662-9779
Source:
Scientific.Net: Materials Science & Technology / Trans Tech Publications Archiv 1984-2008
Topics:
Physics
Notes:
In order to realize active grinding control, a nanometer micropositioning table isdesigned. The table has a circular working area with diameter of 150 mm. Three piezoelectricactuators are utilized in parallel to drive the moving part with flexure guide mechanism. Throughcooperation of the three piezoelectric actuators, the moving part can implement 3-DOF nanometerpositioning. The flexure hinge mechanism can also provide preload for the actuators. The preloadcan keep the moving part from separation with the piezoelectric actuators during moving process.The dynamic model of the micropositioning table is developed with consideration of the drivingcircuit. To improve the dynamic performance of the micropositioning table, a decoupling PIDcontroller is designed by use of frequency domain approach. The experimental tests have beencarried out to verify the performance of the micropositioning table and the established decouplingcontroller
Type of Medium:
Electronic Resource
URL:
http://www.tib-hannover.de/fulltexts/2011/0528/02/23/transtech_doi~10.4028%252Fwww.scientific.net%252FSSP.121-123.603.pdf
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