ISSN:
1013-9826
Source:
Scientific.Net: Materials Science & Technology / Trans Tech Publications Archiv 1984-2008
Topics:
Mechanical Engineering, Materials Science, Production Engineering, Mining and Metallurgy, Traffic Engineering, Precision Mechanics
Notes:
A sol-gel technology to fabricate PZT thick film for cantilever beam was investigated. In thisprocess, PZT nano-powder is dispersed into a PZT sol solution, which is identical with the powder incomposition, and then the PZT suspension and clean PZT sol solution were deposited alternately on anAu/Cr/SiO2/Si substrate using spin-coating route. Above process was repeated in order to deposit thedesired thickness. The results showed that the perovskite PZT thick film with thickness of about 4 μm wasobtained after annealing at 650 °C for 2 h and it has the saturation polarization of 54 μC/cm2, the remnantpolarization of 30 μC/cm2 and the coercive field of 50 kV/cm
Type of Medium:
Electronic Resource
URL:
http://www.tib-hannover.de/fulltexts/2011/0528/01/56/transtech_doi~10.4028%252Fwww.scientific.net%252FKEM.368-372.223.pdf