ISSN:
1089-7623
Quelle:
AIP Digital Archive
Thema:
Physik
,
Elektrotechnik, Elektronik, Nachrichtentechnik
Notizen:
Thermomechanical fatigue, induced by the repeated application of a sufficiently powerful laser pulse, will eventually cause a metallic film to fail. This principle is proposed to cut metal lines for deletive redundancy in microelectronics. Aluminum alloy wires were cut with a series of 5 μs pulses from an argon ion source. The power required to cut 4-μm-wide, 0.75-μm-thick lines was reduced by as much as 87% from that of a single 5 μs laser pulse. By comparison to a single pulse of equal total time, a 70% reduction in power has been realized.
Materialart:
Digitale Medien
URL:
http://dx.doi.org/10.1063/1.1143758
