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A simple profilometer for film thickness measurement (1993)

Wood, J. W. ; Redin, R. D.

[S.l.] : American Institute of Physics (AIP)

Review of Scientific Instruments 64 (1993), S. 2405-2406

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ISSN: 1089-7623

Source: AIP Digital Archive

Topics: Physics , Electrical Engineering, Measurement and Control Technology

Notes: A simple profilometer based upon a commercial strain gauge force transducer is described. It has been used on polymer film coated substrates to determine film thicknesses on the order of 10.0 μm. Measured film thicknesses agree with gravimetrically determined values to within ±0.3 μm.

Type of Medium: Electronic Resource

URL: http://dx.doi.org/10.1063/1.1143897

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