ISSN:
1089-7623
Source:
AIP Digital Archive
Topics:
Physics
,
Electrical Engineering, Measurement and Control Technology
Notes:
We describe the design, construction, and implementation of a low-pass energy filter for use with a liquid metal ion source (LMIS) cluster deposition system. When combined with deceleration of cluster ions to a surface for landing, this filter provides bandpass energy selectivity for high resolution mass separation of clusters produced by the LMIS. We also present results of our initial testing, which shows the filter has an experimental relative energy resolution of less than 0.3%.
Type of Medium:
Electronic Resource
URL:
http://dx.doi.org/10.1063/1.1144807