Electronic Resource
[S.l.]
:
American Institute of Physics (AIP)
Review of Scientific Instruments
65 (1994), S. 2844-2848
ISSN:
1089-7623
Source:
AIP Digital Archive
Topics:
Physics
,
Electrical Engineering, Measurement and Control Technology
Notes:
A microscanning electron microscope (SEM) column has been constructed as an attachment of an ultrahigh-vacuum chamber with a 70 mm diam flange to observe microstructures on a solid surface. The micro-SEM column is 26 mm diam and 140 mm long and operated in an energy range from 100 eV to 3 keV. It consists of a thermal-field-emission (TFE) gun and two magnetic lenses. The excitation of the objective lens for 3 kV electrons is 250 A T at a working distance of 10 mm. The saturated temperature of the objective lens at the excitation of 250 A T is approximately 50 °C and the vacuum of the chamber is 2×10−10 Torr. The electron probe is adjustable against a specimen position from the outside of the vacuum by movement of the SEM column with screws. The spot size of the electron probe is 100 A(ring) at 3 kV and 3000 A(ring) at 300 eV in conditions of a working distance of 10 mm and a probe current of 3×10−11 A.
Type of Medium:
Electronic Resource
URL:
http://dx.doi.org/10.1063/1.1144625
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