ALBERT — All Library Books, journals and Electronic Records Telegrafenberg

Treffer pro Seite

Treffer 1 - 1 | 1 Treffer

Alles auswählen Exportieren

Digitale Medien

Maskless, selective electroetching for metal patterning (1985)

Chan, Winston K.

[S.l.] : American Institute of Physics (AIP)

Journal of Applied Physics 58 (1985), S. 1704-1705

zur Merkliste hinzufügen auf der Merkliste

Details

ISSN: 1089-7550

Quelle: AIP Digital Archive

Thema: Physik

Notizen: An electroetching technique for maskless patterning of metals is described. The method uses the topography of the surface on which the metal is deposited to delineate the pattern during the electroetch, yielding self-aligned metal features that are burr-free and without undercut. Application of the technique to a one-micron linewidth metal-insulator-semiconductor structure useful for insulated-gate field effect transistors is demonstrated.

Materialart: Digitale Medien

URL: http://dx.doi.org/10.1063/1.336306

	Standort	Signatur	Erwartet	Verfügbarkeit

Andere fanden auch interessant ...

Artikel (Nationallizenzen)

Volltext

Treffer 1 - 1 | 1 Treffer