ISSN:
1089-7550
Source:
AIP Digital Archive
Topics:
Physics
Notes:
Thin films have been deposited by XeCl excimer laser ablation of a bulk yttria-stabilized zirconia (YSZ) target. The deposited thin films were characterized in terms of spatial distribution, composition, microstructure, and solid particulates on the film surface through deposition process control. The deposition of dense YSZ films, 0.5–2 μm thick, with an excellent adhesive property at 800 °C was performed on the CeO2-Sm2O3 substrate maintained at 500 °C under an O2 ambient of 5×10−2 Torr. The crystallinity of YSZ thin films was found to be promoted by post-deposition annealing. The YSZ film consisted of a cubic phase with predominant growth along the (200) plane.
Type of Medium:
Electronic Resource
URL:
http://dx.doi.org/10.1063/1.352352