Electronic Resource
[S.l.]
:
American Institute of Physics (AIP)
Journal of Applied Physics
88 (2000), S. 691-695
ISSN:
1089-7550
Source:
AIP Digital Archive
Topics:
Physics
Notes:
We determine the thermal expansion coefficient of a fluorinated poly(arylene ether) low-k dielectric film using Fourier analysis of x-ray reflectivity data. The approach is similar to that used in Fourier analysis of x-ray absorption fine structure. The analysis compares two similar samples, or the same sample as an external parameter is varied, and determines the change in film thickness. The analysis process is very accurate and depends on no assumed model. We determine a thermal expansion coefficient of 55±9×10−6 K−1 using this approach. © 2000 American Institute of Physics.
Type of Medium:
Electronic Resource
URL:
http://dx.doi.org/10.1063/1.373722
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