ISSN:
1077-3118
Source:
AIP Digital Archive
Topics:
Physics
Notes:
The output energy (90 μJ), focal spot diameter (235 μm), and pointing accuracy (±75 μrad) for a 3.7-cm-long Se soft x-ray laser operating at 20.6 and 20.9 nm are reported. Now that this intense soft x-ray source has been well characterized it may find use in such diverse applications as lithography, contact microscopy, holography, and photoionization pumping.
Type of Medium:
Electronic Resource
URL:
http://dx.doi.org/10.1063/1.101359