Electronic Resource
Woodbury, NY
:
American Institute of Physics (AIP)
Applied Physics Letters
56 (1990), S. 2351-2353
ISSN:
1077-3118
Source:
AIP Digital Archive
Topics:
Physics
Notes:
The resolution of the scanning electron microscope can be improved by mounting the sample in the high-field region of a condenser-objective lens. Low-loss electrons (LLEs) are scattered from the sample with an energy loss of less than a few percent of the incident energy. In the past, LLEs have been collected with a retarding-field energy filter. A way has been found to collect LLEs using a detector located within the magnetic field of the condenser-objective lens which provides the required energy-filtering action. This greatly simplifies the apparatus and makes it possible to obtain LLE images with less tilt of the specimen and with a higher beam energy than before.
Type of Medium:
Electronic Resource
URL:
http://dx.doi.org/10.1063/1.102914
|
Location |
Call Number |
Expected |
Availability |