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Measured and simulated electron energy distribution functions in a low-pressure radio frequency discharge in argon (1993)

Turner, M. M. ; Doyle, R. A. ; Hopkins, M. B.

Woodbury, NY : American Institute of Physics (AIP)

Applied Physics Letters 62 (1993), S. 3247-3249

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ISSN: 1077-3118

Source: AIP Digital Archive

Topics: Physics

Notes: We report a combined experimental and computational study of a low-pressure radio frequency discharge in argon. We have determined the electron energy distribution function experimentally using a Langmuir probe system and by simulation using the particle in cell method. A close comparison of these data shows good agreement over pressures from 20 to 200 mTorr. This pressure range encompasses the putative transition from a stochastic to an ohmic electron heating mode [V. A. Godyak and R. B. Piejak, Phys. Rev. Lett. 65, 996 (1990)]. The simulation does show such a transition, and we agree with earlier estimates of the transition pressure.

Type of Medium: Electronic Resource

URL: http://dx.doi.org/10.1063/1.109088

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