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  • 1
    Electronic Resource
    Electronic Resource
    Effect of diamond facet on the electrical properties of Pt/BF+2 ion implanted polycrystalline diamond contacts (1993)
    Woodbury, NY : American Institute of Physics (AIP)
    Applied Physics Letters 63 (1993), S. 3344-3346 
    Details
    ISSN: 1077-3118
    Source: AIP Digital Archive
    Topics: Physics
    Notes: Very good quality of polycrystalline diamond films with different major facets were grown on the Si(100) substrates at different position of the plasma ball in a microwave plasma enhanced chemical vapor deposition chamber. Pt/BF+2 ion implanted polycrystalline diamond contacts were fabricated to examine the effect of diamond facets on their electrical properties. The Pt/diamond contact exhibited Schottky characteristics for the diamond film with major facet (100). In contrast, the Pt/diamond contact exhibited ohmic behavior for the diamond film with major facet (111). The I-V characteristics of the Pt/BF+2 ion implanted polycrystalline diamond contacts were not reliable if the diamond facet factor was not considered.
    Type of Medium: Electronic Resource
    URL: http://dx.doi.org/10.1063/1.110165
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