Electronic Resource
Woodbury, NY
:
American Institute of Physics (AIP)
Applied Physics Letters
73 (1998), S. 31-33
ISSN:
1077-3118
Source:
AIP Digital Archive
Topics:
Physics
Notes:
Methyl radicals from a methane electron cyclotron resonance plasma are measured quantitatively at the sample position by ionization-threshold mass spectrometry (ITMS). The absolute fluxes are determined by calibrating the CH3 ITMS results with those of methane, taking into account the published energy-dependent cross sections for the ionization of CH3 and CH4, respectively. The measured CH3 radical fluxes are on the order of some 1015 cm−2 s−1, which is in accordance with recent modeling results. © 1998 American Institute of Physics.
Type of Medium:
Electronic Resource
URL:
http://dx.doi.org/10.1063/1.121713
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