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  • 1
    Electronic Resource
    Electronic Resource
    Chemometrics-aided RBS analysis of thin films (1991)
    Springer
    Fresenius' Zeitschrift für analytische Chemie 341 (1991), S. 325-331 
    Details
    ISSN: 1618-2650
    Source: Springer Online Journal Archives 1860-2000
    Topics: Chemistry and Pharmacology
    Notes: Summary Elemental analysis of thin films by Rutherford Backscattering Spectrometry (RBS) has been chemometrics-aided in borderline cases: Spectra simulation based on a physical model of Rutherford backscattering is applied for both the prediction of critical analytical parameters and quantitative analysis of overlapping peaks. Non-linear regression using a semi-empirical model of depth profiling allows to improve the determination of concentrations near surface and interface. Statistical tests and multivariate techniques, respectively, enable depth profiles to be judged and compared objectively. Benefits of these methods are demonstrated for high-Tc superconducting and resistor thin layers.
    Type of Medium: Electronic Resource
    URL: http://dx.doi.org/10.1007/BF00321928
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