ISSN:
0360-6376
Keywords:
Physics
;
Polymer and Materials Science
Source:
Wiley InterScience Backfile Collection 1832-2000
Topics:
Chemistry and Pharmacology
Notes:
The composition and gross structural features of plasma polymers formed in the glow regions of an inductively coupled RF plasma with perfluorobenzene and perfluorobenzene/hydrogen mixtures were investigated by ESCA as a function of the operating parameters. The carbon-to-fluorine stoichiometries of the perfluorobenzene polymers are similar and close to those of the starting material but not of the polymers derived from perfluorobenzene/hydrogen mixtures. The rate of film deposition is dependent on the W/FM parameter. Angular and photon energy-dependent studies confirm the vertical homogeneity of the plasma polymer films investigated.
Additional Material:
4 Ill.
Type of Medium:
Electronic Resource
URL:
http://dx.doi.org/10.1002/pol.1982.170200706