ISSN:
0360-6376
Keywords:
Physics
;
Polymer and Materials Science
Source:
Wiley InterScience Backfile Collection 1832-2000
Topics:
Chemistry and Pharmacology
Notes:
The radiation degradation behavior of methyl α-chloroacrylate (MCA) and methacrylonitrile (MCN) copolymers has been investigated as part of a program to develop high-sensitivity polymeric resists for integrated circuit manufacture. High-molecular-weight copolymers were prepared by emulsion techniques. Several different copolymer compositions were prepared varying from 19 to 68 mole % MCA. These copolymers were fractionated and then subjected to γ irradiation from a 60Co Source. The Gs - Gs, Gs - 4Gs values were determined from M̄;F〉nk-1 and Gu-1 versus dose plots, and the Gfs and Gs Values were then calculated. Molecular weights of both unirradiated and irradiated polymers were analyzed by membrane osmometry and gel permeation chromatography. All copolymers exhibited higher degradation susceptibilities than that of poly(methyl methacrylate) (PPMA), which has Gx = 1.3. The individual Gx and Gx values of the copolymers were found to fall between those of the two homopolymers, poly(methyl α-chloroacrylate) (Gx = 6.0) and polymethacrylonitrile (Gx ∼ 3.1). The dependence of Gx and Gx values on molecular weight was minor. The crosslinking susceptibility of the poly(methyl α-chloroacrylate) (Gx ∼ 0.8), was greatly decreased by copolymerization with MCN. Relatively small amounts of MCN caused a large drop in Gx, i.e., Gx ∼ 0.15 at 32% MCN and Gx ∼ 0.03 at 51% MCN. The observation could be attributed to the decreasing probability that crosslinking sites, in the MCA monomer units on adjacent chains, would lie in close proximity.
Additional Material:
3 Ill.
Type of Medium:
Electronic Resource
URL:
http://dx.doi.org/10.1002/pol.1980.170180116
